Wafer-Level RF Measurement System Integrity: How to Verify and When and Why we have to do it

Wafer-level RF measurement system is a complex setup that consists of multiple components and accessories, such as: probe system, microscope, RF probes, cables, adapters, calibration standards, measurement instrumentation, etc. Configuring such a setup, obtaining accurate, repeatable and consistent measurement data require both experience and expertise in RF on-wafer measurements and calibration. This talk reviews the key contributing factors as well as practical methods for evaluating the wafer-level system integrity. By following the discussed strategy, even inexperienced engineers and operators are able to evaluate their system and deliver measurement results with high confidence.