Guidelines for Performing Accurate On-Wafer Measurements Including the Suppression of Parasitic Effects

For correcting on-wafer measurements in industrial applications, fixed-distance calibrations such as SOLT and LRM using commercial impedance standard substrates (ISSs) are usually preferred. This talk shows how the small measurement uncertainties obtained from reference calibrations like multiline TRL can be transferred to industrial calibrations as mentioned above. The talk further elaborates on the parasitic effects caused by eg multimode propagation, nonidealities of the microwave probes and crosstalk effects between adjacent structures. The impact of each effect is discussed, and measures are provided to mitigate these effects as much as possible.