Modeling and Correction of Probe-Probe Crosstalk at mm-Wave Frequencies

The crosstalk or leakage between probes may cause significant errors and uncertainties for on-wafer measurements. This is especially true at mm-wave frequencies when the probes are brought in closer proximity with each other. This talk first reviews the challenges that the existing on-wafer calibration techniques face and then introduces a new error model and the associated so-called “calibration on the fly” calibration method. The new method has been tested at 140GHz–220GHz.