Broadband RF to mm-Wave S-Parameter Measurements for Semiconductor Transistor and IC Test

This talk presents on-wafer solutions for measurements from kHz to hundreds of GHz, for the purposes of device modeling of transistors and also the wideband characterization of integrated circuits. Approaches are discussed to overcome the challenges of over temperature measurements often required to provide full models of these devices and how automation greatly helps data volume and accuracy. Best practice calibration approaches are demonstrated and show real life verifications and device measurements in conjunction with automation approaches that allow unattended test and also easy measurement of a variety of verification structures of differing geometry. Some useful techniques within calibration software with real life data are shown to help evaluate system performance.