Accumulative Mill Rolled Pd Foil Based H₂ Getter for Improving Microwave Device Reliability

Pd is used industrially as a catalyst for hydrogenation reactions and exhaust gas cleaning due to its high hydrogen solubility. When using a bulk Pd as a getter for outgassed H₂ removal from an electronic package however, the bulk Pd material may lose ductility, toughness, mechanical strength and plastic deformation even at PdH(x≤0.58), which greatly limit maximum H₂ absorption capacity as a getter material. With X-ray diffraction analysis and manometry measurements, this paper will show that an accumulative mill rolling process could turn a bulk Pd material into a desirable getter material for scavenging outgassed H₂ from various microelectronic packages and microwave devices.