Temperature Compensated Magnetostatic Wave Resonator Microsystem

This work reports a compact temperature compensating permanent magnet assembly to provide static bias for micro-machined distributed magnetostatic forward volume wave (MSFVW) resonators. The cuboid-shaped assembly is 8.2 mm × 8.2 mm × 6.3 mm and provides strong static magnetic field to bias MSFVW resonators at a frequency of 19.65 GHz. Compensated by the bias assembly, the resonator exhibits a temperature coefficient of frequency (TCF) of -26.81 ppm/K compared to uncompensated TCF of -359 ppm/K. The temperature compensated resonator shows a quality factor of 1050 and a coupling coefficient of 4% at room temperature.