Limitations and Importance of EM Models for On-Wafer High Frequency Performance Evaluation

This paper introduces a new simple electromagnetic (EM) probe model to better account for the probe parasitics incurred when measuring on-wafer coplanar waveguide (CPW) lines up to 220 GHz. This is the first time the performance of CPW transmission lines on a silicon wafer have been studied with a traditional bridge model and the new bridge-probe model. The electric field study shows that the proposed new bridge-probe model better identifies the interference of the probe structure with the metal chuck and the multilayer measurement environment.