Millimeter-Wave High Q-Factor Sixteenth Mode SIW Cavity Resonator Implemented in 0.18µm CMOS Technology

Millimeter-wave miniaturized Substrate Integrated Waveguide (SIW) cavity resonator is proposed in 0.18-µm CMOS technology. Miniaturization of the SIW cavity resonator is achieved first by taking 1/16th parts of the standard SIW and employing folded ridge structure. Later this folded ridge sixteenth mode SIW cavity is inductively loaded by a complementary split-ring resonator, which provides internal matching within the cavity resonator. This improved matching enhances the return loss, the external Q-factor, and ultimately, the loaded Q-factor of the proposed cavity resonator. At 60 GHz resonance frequency, the fabricated prototype of the proposed cavity resonator presents a measured reflection coefficient of -33.42 dB, with the external Q-factor 112. Moreover, the active area of the fabricated cavity without measuring pads is only 0.019 mm².