A 3-D Split Ring Resonator for Power-Efficient Microwave Plasma Jets

This article introduces a novel approach to achieve efficient atmospheric-pressure plasma jets by incorporating a 3-D Split Ring Resonator (SRR) embedded in enclosed walls to form a cavity. The SRR concentrates electric fields within its gap while the cavity suppresses potential leakage. This configuration collectively excites a hybrid resonance, generating a concentrated |E|-field within the SRR gap. A capillary tube directs gas flow through the high |E|-field region. With an input power exceeding 3 W, gas breakdown in the strong |E|-field initiates, propelling the plasma plume outward. This technology offers a compelling solution for diverse applications in medicine and material processing, showcasing remarkable efficiency, a streamlined design, and seamless integration with PCB manufacturing processes.